1. **Valve Type**: Normally Closed
2. **Flow Range**
- Air/O₂/N₂: 1~300 SCCM, 0.03~50 SLM
- Ar/CO₂: 1~300 SCCM, 0.03~30 SLM
3. **Performance**
- Accuracy: ±1.0% S.P.(≥35%F.S.); ±0.35% F.S.(＜35%F.S.)
- Linearity: ±0.5% F.S.; Repeatability: ±0.2% F.S.
- Response Time: 1 sec
- **Differential Pressure**:
- 0.05~0.35 MPa (0＜Flow ≤10 SLM)
- Max Pressure: 3 MPa
- Leak Rate: 1×10⁻¹⁰ Pa·m³/s (He)
4. **Operating Temperature**: 5~45℃
5. **Power & Signal**
- Power Supply: +15~+28 VDC
- Signal: RS485/EtherCAT; 1‑5VDC / 4‑20mA
6. **Mechanical**:
- Fitting: 1/4” Compression / 1/4” VCR
- Wetted material: 316L SS, FKM
7. **Weight**: 0.95 kg
8. **Installation**: Horizontal preferred; zero calibration required for vertical mounting
